报告时间：10月16日（星期一） 8:30-9:30

报告地点：能源基础5号楼二楼会议室（201房间）

报告人：Dr. Edit Szilágyi, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary

　　报告摘要：

　　In ion-beam analysis (IBA) the depth profiles are extracted from the experimentally determined energy profiles. The samples are usually considered to have only one-dimensional structure, i.e., the elemental concentrations vary only with depth.

　　If the sample is not ideal, i.e., rough surface, lateral inhomogeneity, inhomogeneity in the thickness, voids or 3D nanostructures etc. are involved, an increase in the energy spread and corresponding decrease in the depth resolution is encountered. In this case a new energy spread contribution connected to the structure of the sample, the so called “structure-induced energy spread” can be introduced. The real three-dimension (3D) structure of the samples on the nm–mm scale results, in some cases, in serious distortions in the obtained spectra. To interpret this type of measurements, Monte Carlo simulations were performed by the RBS-MAST code taking into account the 3D structure of the sample.

　　The seminar will start with a short review on various methods of ion-beam analysis. Afterwards spectra taken on real 3D nanostructures and their evaluation with the RBS-MAST code will be presented.

　　报告人简介：

　　Dr. Edit Szilágyi is scientific counsellor at the Wigner Research Centre for Physics of the Hungarian Academy of Sciences; she is the head of the Department of Materials Science by Nuclear Methods.

　　She graduated in physics from the University of Debrecen in 1987 and made her PhD degree also at the University of Debrecen in 1990. In 1991 she was postdoctoral fellow of the French Ministry of Research and Technology at the Group of Solid State Physics of the University of Paris 6&7. She was awarded the CSc and the DSc degrees of the Hungarian Academy of Sciences in 1994 and 2011, respectively.

　　Her main research field is the ion-solid interaction. Her work includes nuclear analysis using MeV energy ion beams (RBS - Rutherford Backscattering Spectrometry, ERDA - Elastic Recoil Detection Analysis, NRA - Nuclear Reaction Analysis, channelling). She developed a computer code to calculate the depth resolution of ion beam techniques. She is extensively dealing with ion implantation and with fundamental processes of ion implantation in porous silicon, metals, and semiconductors.

　　联系人：格日乐 DNL2005

　　联系电话：84379711