报告时间：2019年3月21日（星期四）上午9:00

报告地点: 催化基础国重楼三楼大会议室

报告人：Yang Li (李阳)

　　报告摘要:

　　It has been demonstrated that it is beneficial for high rate deposition of silicon based solar cell material using VHF over RF PECVD. However, uniformity becomes a significant challenge when the cathode size approaches to 1/4 wavelength. In this discussion, the development process for a large area VHF cathode aimed for a RTR deposition system is presented. The emphasized areas are on the approach and practical design, setup issues we had experienced. The success, failure and lesson learned are hopefully helping future development.

　　报告人简介:

　　Doctor Yang Li obtained his PhD in electrical engineering department in the solid state electronic area. Before joined United Solar division, he spent about 8 years in the field of hydrogen storage system development. After transferred to the solar division, he devoted the next 6 years lead the development of large area VHF cathode for silicon based solar cell thin film deposition. The proof of concept cathode achieved uniformity goals.

　　联系人: DNL1606 王辉

　　联系电话：84617008